> You should consider MEM CAD from Coventor. As the name implies it is
> designed for the simulation of micron sized devices and features the
> ability to couple multiple solvers. For example,  from a system
> undergoing joule heating from an applied voltage you can get
> the Current
> Density in the conductor, the temperature field, thermal deformation,
> and internal stresses.

ANSYS will do this as well.