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MEMSnet Home: MEMS-Talk: Highest resistivity silicon?
Highest resistivity silicon?
2002-05-20
Fred Hussain
2002-05-20
Michael Pedersen
2002-05-20
David Nemeth
2002-05-20
Michael Barger
2002-05-20
Kenneth Smith
2002-05-22
mmf
2002-05-20
Kenneth Smith
2002-05-20
Michael D Martin
Highest resistivity silicon?
Fred Hussain
2002-05-20
Dear all,

I am looking for silicon substrates which can be machined using conventional
MEMS type processes, but at the same time are highly insulating. I've found
a web page with silicon of 250Kohm-cm resistivity -
http://www.tydex.ru/materials/materials2/Si.html.

Does anybody:
have any experience of working with such materials?
know of any issues, for example the stability of the resistivity with
temperature?
micromachined it without any major issues?
know of any suppliers?

Thanking you in advance.

Regards,

Fred.

--------------------------------------------
Dr Fred Hussain
The Technology Partnership plc
Melbourn Science Park
Cambridge Road
Melbourn
Royston
Hertfordshire
SG8 6EE

Tel: 01763 262626
Fax: 01763 261582
www.ttpgroup.com
---------------------------------------------

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