Hi Yaojin-
At MEMSCAP we have software for RF MEMS that runs on both PC and UNIX platforms
and that integrates with well-known RF design software.
We have experience specifically with resonators and have published several
papers on our results. I'd be happy to share some more information
with you if you would like to contact me at [email protected].
Sincerely,
Mary Ann Maher

"Lin, Yaojian" wrote:

> Dear MEMS guys:
>
> I am looking for the design and simulation tool for the RF MEMS, especially
> Resonator.
>
> Could you please give me any suggestions? Thanks a lot.
>
> Yaojian Lin
> SyChip, Inc.
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