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MEMSnet Home: MEMS-Talk: metal with HF?
metal with HF?
2002-05-22
Jing Liu
2002-05-22
Michael Pedersen
2002-05-22
oray orkun cellek
metal with HF?
Jing Liu
2002-05-22
To who may concern,

Does anyone know whether thin coated film of Cu could resist concentrated HF
etching? How about other metal like Ni and Ti? Are there any reference I could
find?

Jing

reply
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