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MEMSnet Home: MEMS-Talk: metal with HF?
metal with HF?
2002-05-22
Jing Liu
2002-05-22
Michael Pedersen
2002-05-22
oray orkun cellek
metal with HF?
oray orkun cellek
2002-05-22
Dear Jing,

I do not know the other metals but diluted HF removes thin Ti layers.

Oray Orkun Cellek
Middle East Technical University
Electrical & Electronics Engineering Department
Ankara
Turkey
----- Original Message -----
From: Jing Liu
Sent: Wednesday, May 22, 2002 9:13 AM
To: [email protected]
Subject: [mems-talk] metal with HF?

To who may concern,

Does anyone know whether thin coated film of Cu could resist concentrated HF
etching? How about other metal like Ni and Ti? Are there any reference I
could
find?

Jing
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