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MEMSnet Home: MEMS-Talk: Gold film
Gold film
how to deposit PZT
2002-05-10
Michael Barger
2002-05-20
Gurvinderjit Singh
2002-05-20
___
2002-05-21
Ravi Shankar
2002-05-21
Michael D Martin
2002-05-22
Henry Yang
2002-05-25
TEL Klaus Beschorner
Gold film
Henry Yang
2002-05-22
What is the condition of your annealing chamber?

Henry

--------------------------------------------------------------
Henry Yang
Mechanics and Micromechanics Group
IBM Almaden Research Center
408-927-2319



                      Ravi Shankar
                                          cc:
                      Sent by:                 Subject:  Re: [mems-talk] Gold
film
                      mems-talk-admin@m
                      emsnet.org


                      05/21/2002 09:43
                      AM
                      Please respond to
                      mems-talk





what is the conditions in your evaporation system.
Ravi shankar


On Mon, 20 May 2002, Gurvinderjit Singh wrote:

> Dear friend i have one query.
> I am depositing gold film (thickness 0.1 micron)by thermal evaporation on
> oxides,
> but when  i am annealing my sample to 700K this gold film become non
> -conductive may be  duo to formation of gold oxide. But from
> literature i found
> that gold should not become oxide till 1200K. I also read people using
> gold electrodes (thin film by thermal evaporation) on their samples and
> work till 900k kindly let me know where i am doing mistake, wether to
take
> more thick film or something else.
>
>
>
>
_______________________________________________________________________________

>
>
>    Gurvinderjit Singh Ahluwalia             Tel: +91-0731-488656
>      Laser Materials Division               Fax: +91-0731-488650
>    Centre for Advanced Technology         email: [email protected]
>    Indore - 452 013  INDIA
>
>
_______________________________________________________________________________

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