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MEMSnet Home: MEMS-Talk: High TCR metal
PMMA and RIE
2002-05-22
Sreemanth M Venkata Uppuluri
High TCR metal
2002-05-23
Tsukasa Matsuura
High TCR metal
Tsukasa Matsuura
2002-05-23
Hi,
I'm developing thermal flow sensors using Ni thin film.
To get higher sensitivity, I am looking for metals with higher TCR
(Temperature Coefficient of Resistivity) than Ni (TCR is about
6000ppm/deg).
Does anybody know some metals?
Thanks.

Tsukasa

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