Try heating the substrate using a heat-gun. Load the substrate with the solid
wax (powdered or milled) and melt it so that the wax is pooled in the surface of
the (heated) substrate. When the wax has completly melted, initiate the spin
cycle. (The wax will solidify from the air/wax interface first, while remaining
molten underneath. This should allow enough time for the wax to coat the
substrate in a thin film. You may need to experiemnt with timing the removal of
the heat source before / afer the spoinning process. As long as the molten wax
wets the glass substrate, this method WILL work if you spend some time
experimenting with the conditions.

Karl Cazzini (Ph.D)
Senior Scientist


> From: "Gaoshan Jing" 
> Date: 2002/05/23 Thu AM 02:51:34 EDT
> To: 
> Subject: [mems-talk] Spin coat wax on glass wafer
>
> Hi:
> Folks. I am trying to spin coat a thin film of wax on a 2 inch glass wafer. I
> made wax solution by diluting wax in butanol. But it is difficult to get
> uniform wax film. Does anyboby have some good advice for me?
>
> Thanks in advance.
> Gaoshan Jing
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