how to improve the adhesion between the SU8 structure and the
silicon wafer ?
Kuo Wu Cheng
2002-05-23
Dear all:
How to improve the adhesion between the SU8 structure and the silicon
wafer while the wafer is put into the KOH solution doing
an anisotropic etching. I find the SU8 structure doesn't destruct but will
peel off from the wafer in the KOH etching.
Thank you very much!
compilments
BagelKuo