I can provide services for < 100 Mpa in both PE and LP CVD. Send me
your needs offlist for more information.
Regards
Ken
Robert M. Hamilton wrote:
> Please review the www site:
> http://www.mems-exchange.org/
> to learn about nitride services.
>
> Sincerely,
> Bob Hamilton
>
> Javeed Shaikh Mohammed wrote:
>
>>Hello all,
>> Iam a Graduate student looking for Process providers. I need to
>>deposit a Silicon Nitride layer of thickness 0.3-0.6 microns. I need residual
>>stress in the film to be TENSILE ( ranging 60-90 MPa). The Silicon nitride can
>>be either PECVD or LPCVD.
>>
>>If anyone has some information, please mail me.
>>
>>Javeed Shaikh Mohammed,
>>BIOMINDS LAB,IFM,
>>Louisiana Tech University.
>>Phone: (318) 257-5127
>>FAX: (318) 257-5104
>>MAIL: PO Box 10307,911 Hergot Ave.
>> Ruston, LA 71272
>>
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>>Hosted by the MEMS Exchange, providers of MEMS processing services.
>>Visit us at http://www.mems-exchange.org/
>>
>
--
Kmbh Associates
47 Rocket Circle
Rancho Cordova, CA 95742 U S A
510-714-5055 Efax- 510 217 4421 or 561 658 6136
High Purity Float Zone and Specialty CZ Silicon for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Quartz, Glass, Pyrex and Borofloat Wafer Supply. Anodic Bonding. SOG, SOS.