A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Silicon Nitride Deposition ( PECVD or LPCVD)
Silicon Nitride Deposition ( PECVD or LPCVD)
2002-05-23
Javeed Shaikh Mohammed
2002-05-24
Robert M. Hamilton
2002-05-24
Kenneth Smith
Silicon Nitride Deposition ( PECVD or LPCVD)
Kenneth Smith
2002-05-24
I can provide services for < 100 Mpa in  both PE and LP CVD. Send me
your needs offlist for more information.
Regards
Ken

Robert M. Hamilton wrote:

> Please review the www site:
> http://www.mems-exchange.org/
> to learn about nitride services.
>
> Sincerely,
> Bob Hamilton
>
> Javeed Shaikh Mohammed wrote:
>
>>Hello all,
>>         Iam a Graduate student looking for Process providers. I need to
>>deposit a Silicon Nitride layer of thickness 0.3-0.6 microns. I need residual
>>stress in the film to be TENSILE ( ranging 60-90 MPa). The Silicon nitride can
>>be either PECVD or LPCVD.
>>
>>If anyone has some information, please mail me.
>>
>>Javeed Shaikh Mohammed,
>>BIOMINDS LAB,IFM,
>>Louisiana Tech University.
>>Phone: (318) 257-5127
>>FAX:   (318) 257-5104
>>MAIL: PO Box 10307,911 Hergot Ave.
>>      Ruston, LA  71272
>>
>>-------------------------------------------------
>>This mail sent through IMP: http://horde.org/imp/
>>_______________________________________________
>>[email protected] mailing list: to unsubscribe or change your list
>>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>>Hosted by the MEMS Exchange, providers of MEMS processing services.
>>Visit us at http://www.mems-exchange.org/
>>
>


--


Kmbh Associates
47 Rocket Circle
Rancho Cordova, CA 95742  U  S  A
510-714-5055 Efax- 510 217 4421 or 561 658 6136

High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Quartz, Glass, Pyrex and Borofloat Wafer Supply. Anodic Bonding. SOG, SOS.

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Mentor Graphics Corporation
MEMS Technology Review
Tanner EDA by Mentor Graphics