Hi!
My name is Tero Kaija, and I am just studying things about MEMS. On thing
that I would need right now, is some information about actuation voltages.
I have read that they are typically several volts, maybe over ten volts.
Does anyone have experience about producing these voltages on chip? Let's
say that we have supply voltage like 3 volts and we would need actuation
voltage as high as 10 volts. Is it possible to build a dc-dc converter
(boost)
or several converters and then put them into cascade? Or is there other
possibilities?
I would be very grateful for your anwers
Best Regards
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