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MEMSnet Home: MEMS-Talk: Spin coat wax on glass wafer
Spin coat wax on glass wafer
2002-05-23
Gaoshan Jing
2002-05-23
Karl Cazzini
2002-05-28
Gaoshan Jing
2002-05-28
Luesebrink Helge
Spin coat wax on glass wafer
Luesebrink Helge
2002-05-28
Hi Gaoshan,

check out www.EVGroup.com temporary bonding/debonding.

Looking forward to hearing from you soon.
With very best regards,

Helge W. Luesebrink

EV Group, Inc. - Regional Sales Manager -Tel: (401) 784 0008; Fax: (401)
784 9933; e-mail: [email protected] ; Web site: www.EVGroup.com





-----Original Message-----
From: Gaoshan Jing [mailto:[email protected]]
Sent: Thursday, May 23, 2002 2:52 AM
To: [email protected]
Subject: [mems-talk] Spin coat wax on glass wafer


Hi:
Folks. I am trying to spin coat a thin film of wax on a 2 inch glass wafer.
I
made wax solution by diluting wax in butanol. But it is difficult to get
uniform wax film. Does anyboby have some good advice for me?

Thanks in advance.
Gaoshan Jing
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