Robert-

If you search the IEEE Xplore "Mehregany", you will find many other
electrostatic motor publications.  Obviously, Sandia Labs also has a lot of
motors that are driven with electrostatically-actuated lateral resonant
devices.  Below are some electrostatic micromotor publications of mine and
my CWRU colleagues as well as a few others that I have referenced in the
past (I may not be the most up to date on the non-CWRU publications,
however).

Have fun!

-Kevin

Kevin C. Stark, Ph.D.
Senior Program Manager
NineSigma, Inc.
21945 Chagrin Blvd.
Cleveland, OH  44122
216-295-4806
216-295-4825 (fax)
[email protected]
www.ninesigma.com

N. J. Mourlas, K. C. Stark, M. Mehregany, S. M. Phillips, "Exploring
Polysilicon Micromotors for Data Storage Micro Disks." In Proceedings of
the 1996 IEEE Micro Electro Mechanical Systems Workshop, San Diego, CA,
February 1996.

K. C. Stark, M. Mehregany, and S. M. Phillips, "Mechanical Coupling and
Direct Torque Measurement of Outer-Rotor Polysilicon Micromotors."  In
Proceedings of the 1997 IEEE Micro Electro Mechanical Systems Workshop,
Nagoya, Japan, January 1997.

K. C. Stark, A. A. Yasseen, S. M. Phillips, and M. Mehregany, "Micro Torque
Measurement Using Outer-Rotor Polysilicon Micromotors."  Invited paper to
appear in Proceedings of the 2002 IEEE Sensors Conference, Orlando, FL,
June 2002.

A.A. Yasseen, Chien Hung Wu, C.A. Zorman, M. Mehregany, "Fabrication and
testing of surface micromachined polycrystalline SiC micromotors," IEEE
Electron Device Letters, Vol. 21, Issue 4, pp 164-166, April 2000.

A.A. Yasseen, Chien Hung Wu, C.A. Zorman, M. Mehregany, "Fabrication and
testing of surface micromachined silicon carbide micromotors," IEEE MEMS
Conference, pp 644 -649, 1999.

A.A. Yasseen, J. Mitchell, T. Streit, D.A. Smith, M. Mehregany, "A rotary
electrostatic micromotor 1/spl times/8 optical switch," IEEE MEMS
Conference, pp. 116-120, 1998.

A.A. Yasseen, S.W. Smith, M. Mehregany, F.L. Merat, "Diffraction grating
scanners using polysilicon micromotors," IEEE MEMS Workshop, p 175, 1995.

K. Deng and M. Mehregany, "Outer-rotor polysilicon wobble micromotors,"
IEEE MEMS Workshop, 269-272, 1994.

V. R. Dhuler, M. Mehregany, and S.M. Phillips, "An experimental technique
and a model for studying the operation of harmonic side-drive micromotors,"
IEEE Transactions on Electron Devices, vol. 40, pp.1977-1984, Nov. 1993.

V. R. Dhuler, M. Mehregany, and S.M. Phillips, "A comparative study of
bearing designs and operational environments for harmonic side-drive
micromotors," IEEE Transactions on Electron Devices, vol. 40, pp.1985-1989,
Nov. 1993.

M.P. Omar, M. Mehregany, R.L. Mullen, "Electric and fluid field analysis of
side-drive micromotors," Journal of Microelectromechanical Systems, vol 1,
no. 3, page 130, Sept 1992.

R. Legtenberg et al, "Electrostatic Microactuators with Integrated Gear
Linkages for Mechanical Power Transmission," IEEE MEMS Workshop, pp
204-209, 1996.

T. Furuhata, et. al., "Outer rotor surface-micromachined wobble
micromotor," in IEEE MEMS Workshop, pp 161-166, 1993.

Y. Gianchandani and K. Najafi, "Batch fabrication and assembly of
micromotor-driven mechanisms with multi-level linkages," in Proceedings of
the IEEE MEMS Workshop, pp 141-146, 1992.

K. Suzumori and K. Hori, "Micro electrostatic wobble motor with toothed
electrodes," IEEE MEMS Workshop, pp 221-226, 1997.



-----Original Message-----

Message: 6
Date: Thu, 16 May 2002 10:56:55 -0500
To: [email protected]
From: Robert Dean 
Subject: [mems-talk] MEMS Rotary motors
Reply-To: [email protected]

>Hello,

I am trying to find publications on MEMS electrostatic rotary motors.  I
have the 1990 publication by Dr. Mehran Mehregany at Case Western
University entitled, "A Study of Three Microfabricated Variable-capacitance

Motors."  Are there more recent publications for this type of device?

Sincerely,

Robert Dean

Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849

Voice: 334-844-1838
Fax:   334-844-1898
Email: [email protected]