Hi,
I have heard of them, they have an
inductively Coupled system called the
'Tornado' - thats about all i know.

is it performing ok with respect to

Linewidth and wafer uniformity during etching of oxide (or nitride)?

Phil





-----Original Message-----
From: Mr. Malek [mailto:[email protected]]
Sent: 28 May 2002 19:41
To: [email protected]
Subject: [mems-talk] SAMCO Etching Systems?


Has anyone ever heard of SAMCO? They are Japanese
company with an office in Sunnyvale, CA. We are
currenlty evaluating their systems. I was wondering if
there is anyone who has heard of this company before
or has any of their systems. Their Web site URL is
http://www.samcointl.com. Any information is
appreciated.

Thank you.
Yahoo! - Official partner of 2002 FIFA World Cup
http://fifaworldcup.yahoo.com
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