Dear MEMS-talk community members,

I'm looking for some general information on deep UV resists. For instance,
what are the most popular deep UV resists used on the market? Who are the
manufacturers? Is there something special about deep UV resists processing
(special equipment different from what us used for processing of i- and
g-line resists)?

Thank you very much in advance,

Inna Mushkatinskaya

Sr. Process Specialist
Anvik Corporation
6 Skyline Drive
Hawthorne NY 10532

Tel: 914-345-2442, etx.18
Fax: 914-345-2452

Web: www.anvik.com
E-mail: [email protected]