Hi Faheem,
LPCVD silicon nitride survives HF. I have used this as a protective layer
in a sacrificial etch using 48% HF.
best wishes,
Helen.
Dr Helen Berney, MIEEE, MEBF
National Microelectronics Research Centre, Prospect Row, Cork, Ireland
Tel +353-21-4904010 Fax +353-21-4270271 Email [email protected]
http://www.nmrc.ie/research/transducers-group/index.html
-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of [email protected]
Sent: 30 May 2002 16:29
To: [email protected]
Subject: [mems-talk] dielectric materials can survive HF
Hello All
I am testing a MUMPS capacitor, and I need a dielectric layer.
Does anyone know of dielectric materials can survive HF?
In addition to, it has high dielectric constants!
***********************************
Faheem F. Faheem
University of Colorado
Mechaical Engineering
Campus Box 427
Boulder, CO 80309
PH: 303-492-0877
Fax: 303-492-3498
http://mems.colorado.edu
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