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MEMSnet Home: MEMS-Talk: HF and photoresist mask
HF and photoresist mask
2002-05-30
Jing Liu
2002-05-30
Mighty Platypus
2002-05-30
Bill Moffat
2002-05-30
Henry Yang
2002-05-30
[email protected]
2002-06-03
Soojin Oh
2002-05-31
Jing Liu
2002-05-31
Mighty Platypus
metal-glass bonding and debonding
2002-06-03
carlton watson
2002-05-31
Greg Miller
2002-05-31
Bill Moffat
2002-05-31
Bill Moffat
2002-05-31
Bill Moffat
2002-05-31
Jing Liu
2002-05-31
Roger Shile
HF and photoresist mask
Jing Liu
2002-05-31
Jesse,

Did you do hardbake after litho? How did you clean the oxide suface?

Jing

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