I did hardbake the PR. It was AZ 5214, applied to a piranha-cleaned, HMDS
vapor-coated, borofloat glass wafer. It peeled off in less than a
minute. With thermal oxide, maybe your adhesion will be a *little*
better. I abandoned this process pretty quickly, so Bill Moffat's post is
probably more pertinent.

Jesse Fowler

On Fri, 31 May 2002, Jing Liu wrote:

> Jesse,
>
> Did you do hardbake after litho? How did you clean the oxide suface?
>
> Jing
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