Hello Mlan,
My arsenal lists heated HCl/HNO3 3/1 for etching indium. I believe this is
also known as Aqua Regia.
I have used 45C H2O/HCl/HNO3 15/4/1 to etch ITO, so it may still work with
a little dilution. THen again, maybe not.
Jesse Fowler
UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
Los Angeles, CA 90095-1597 | (310)825-3977
"Battery is safe if not provoked." -- _Batteries in a Portable World_
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Version 3.1
GE/S$ d- s:- a- C+ UL P L++ E- W+ N+@ !o K++ w !O M !V PS+ PE++(-) Y
PGP-- t++@ 5++ X R+ !tv b++ DI+ D G e++/*>++++/* h---/* r+++ y+++
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On Fri, 31 May 2002, Milan Buncick wrote:
> Hi all,
> Can someone please recommend an etch recipe for indium metal.
> Thanks,
> Milan
>
> Dr. Milan Buncick
> Director, MEMS/Photonics
> The AEgis TEchnologies Group Inc.
> 655 Discovery Drive
> Suite 301
> Huntsville, AL 35806
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