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MEMSnet Home: MEMS-Talk: Removal of SU-8
Removal of SU-8
2002-06-04
Jeff Zahn
2002-06-04
[email protected]
Removal of SU-8
Jeff Zahn
2002-06-04
Hi all,

I keep seeing posts on this discussion about what a
pain it is to remove SU-8, and I couldn't be more in
agreement.  However, I was recently ordering some SU-8
and the saleperson at Microchem told me about a spin
on product called omnicoat which is applied to your
wafer under the SU-8 layer.  This layer is supposed to
be attacked by 1165 PR remover and "lift off" the
SU-8.

Does anyone have experiance using this material? Does
it work well, and how does it affect SU-8 adhesion
before removing the SU-8?

Regards,

Jeff
Yahoo! - Official partner of 2002 FIFA World Cup
http://fifaworldcup.yahoo.com

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