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MEMSnet Home: MEMS-Talk: Re: problem of sidewall inhibition polymer
Re: problem of sidewall inhibition polymer
2002-06-04
[email protected]
Re: problem of sidewall inhibition polymer
[email protected]
2002-06-04
Hi,
What kind of polymer you are using?
At temperature higher that glass transition temperature, the etch profile is
purely isotropic somebody just called plasma ashing.
you can try to use some thermoset polymer or block the isotropic etching by
cooling the substrate.

feng

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