>Hello,

I have a MEMS sensor that has aluminum traces covered with 0.4um of
silicon-nitride, for passivation, that must operate in a moist-salty
environment.  The part has failed, and I suspect that the moist-salty air
has permeated through the SiN layer and damaged the aluminum traces
underneath.  Any suggestions?


Robert Dean

Research Associate IV
Center for Advanced Vehicle Electronics
Auburn University
200 Broun Hall
Auburn, AL 36849

Voice: 334-844-1838
Fax:   334-844-1898
Email: [email protected]