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MEMSnet Home: MEMS-Talk: Titanium Spluttering
Titanium Spluttering
2002-06-04
Oliver Powell
2002-06-05
Mark Leonard
2002-06-05
[email protected]
Titanium Spluttering
[email protected]
2002-06-05
Sounds like you have either a leak in your system or somehow are allowing
nitrogen to be present during deposition making a TiN of some sort. If you
are getting many beautiful colors that is what I would suspect. This can be
from a variety of problems with valves ect so you will need to determine
where the leak happens to be . good luck

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