I am looking for a tape to put on the backside of 100 mm Si wafers to preserve
the oxide on the back, while etching the front in buffered oxide etch.

I have seen this done using dicing tape.  A coworker told me about something
called "Yellow Tape" that came in circular pieces the same size as the wafer,
apparently made for this purpose.  After use, the Yellow Tape was removed with
acetone, which would be an advantage over peeling dicing tape from delicate
substrates.

Could someone refer me to a source for this Yellow Tape or suggest an
alternative?

Roger Shile

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