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MEMSnet Home: MEMS-Talk: oxide layer on SiN films?
oxide layer on SiN films?
2002-06-06
Christopher F. Blanford
2002-06-06
[email protected]
2002-06-07
Roger Shile
oxide layer on SiN films?
Christopher F. Blanford
2002-06-06
Hello,

Does anyone know whether SiN thin films form an oxide layer on it in the
same way that Si does?

Regards,

Chris Blanford

--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: (44)/(0)-1865-282603; Fax: (44)/(0)-1865-272690
PGP keyID: 8D830BC9  http://pgp.mit.edu/

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