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MEMSnet Home: MEMS-Talk: oxide layer on SiN films?
oxide layer on SiN films?
2002-06-06
Christopher F. Blanford
2002-06-06
[email protected]
2002-06-07
Roger Shile
oxide layer on SiN films?
[email protected]
2002-06-06
Not very much oxide growth on top of nitride unless you deposit via pecvd.
Bob Henderson
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