A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: oxide layer on SiN films?
oxide layer on SiN films?
2002-06-06
Christopher F. Blanford
2002-06-06
[email protected]
2002-06-07
Roger Shile
oxide layer on SiN films?
[email protected]
2002-06-06
Not very much oxide growth on top of nitride unless you deposit via pecvd.
Bob Henderson
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Addison Engineering
Tanner EDA by Mentor Graphics
The Branford Group