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MEMSnet Home: MEMS-Talk: Re: MEMS-talk digest, Vol 1 #312 - 9 msgs
Re: MEMS-talk digest, Vol 1 #312 - 9 msgs
2002-06-06
[email protected]
Re: MEMS-talk digest, Vol 1 #312 - 9 msgs
[email protected]
2002-06-06
Yes it does.

al


Message: 9
Date: Thu, 6 Jun 2002 15:30:50 +0100
From: Christopher F. Blanford
  
To: [email protected]
Subject: [mems-talk] oxide layer on SiN films?
Reply-To: [email protected]

Hello,

Does anyone know whether SiN thin films form an oxide layer on it in the
same way that Si does?

Regards,

Chris Blanford



Avi Laker
Teccor Electronics

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