Dear all:

I am looking for the foundary which can do RIE of polyimide.

The polyimide is PI2611, not photo definable, which is 10 um thick and the
patterns were already defined by Al layer.

The side wall of polyimde needs to be close to vertical.

Thanks




Bo-Kuai Lai
Departmet of Materials Science nd Engineering
Case Western Reserve University
10900 Euclid Ave.
Cleveland, Ohio 44106
Phone: 216-368-4819
Fax:   216-368-4209
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