Hello!
We are trying to find SOI wafer with thick SiO2 layer about 6um thickness.
Or If you know some group or person who deposite SiO2 film more than 6 um.
Please,
Let me know the contact point.
We are looking for sacrificial layer for poly-silicon actuator structure.
Have a nice day for everybody.
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Soon Cheol Kweon
Members of Technical Staff.
MEMS Lab.
SAMSUNG
Advanced Institute of Technology
P.O.Box 111, Suwon
440-600, KOREA
TEL:82-31-280-9448
Fax:82-31-280-9473
E-mail:[email protected][email protected]
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