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MEMSnet Home: MEMS-Talk: Thick insulator layer(~6 um) SOI wafer
Thick insulator layer(~6 um) SOI wafer
2002-06-11
[email protected]
2002-06-19
Soojin Oh
2002-06-21
Kenneth Smith
Thick insulator layer(~6 um) SOI wafer
[email protected]
2002-06-11
Hello!

  We are trying to find SOI wafer with thick SiO2 layer about 6um thickness.

Or If you know some group or person who deposite SiO2 film more than 6 um.
Please,

Let me know the contact point.

  We are looking for sacrificial layer for poly-silicon actuator structure.


Have a nice day for everybody.



----------------------------------
Soon Cheol Kweon

Members of Technical Staff.
MEMS Lab.

SAMSUNG
Advanced Institute of Technology

P.O.Box 111, Suwon
440-600, KOREA

TEL:82-31-280-9448
Fax:82-31-280-9473
E-mail:[email protected]
        [email protected]
-------------------------------------

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