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MEMSnet Home: MEMS-Talk: TiN
Metal mask for HF
2002-05-23
Dlee Li
2002-05-25
Wuyong Peng
TiN
2002-06-12
Masahiro Tsugai
TiN
Masahiro Tsugai
2002-06-12
Dear friends,

I would like to get information regading tecnical papers
dealing with thermal expantion coefficient of TiN thin layer.

Thanks in advance.
Masahiro

reply
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