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MEMSnet Home: MEMS-Talk: TMAH effetc on Chromium and Polyimide film
TMAH effetc on Chromium and Polyimide film
2002-06-02
aslam muhammad
2002-06-06
shay kaplan
2002-06-12
Sandra Bermejo
TMAH effetc on Chromium and Polyimide film
Sandra Bermejo
2002-06-12
Hi,
I am really interested in the effect of TMAH in chromium layers. Do they
really stand a long etch (8 to 12 hours, for example?)
Thanks for your help,
Sandra Bermejo

Semiconductor Devices Group,
Barcelona, Spain

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