Hi Masahiro Tsugai,

I went through your question on mems-talk sent by you today.
According to the handbook I have on "LSI process technology",
the thermal expansion coefficient of TiN is 6.3x10-6 @20degC.
I am sure this value is trustworthy.

Tsukasa

----- Original Message -----
From: "Masahiro Tsugai" 
To: 
Sent: Wednesday, June 12, 2002 5:23 PM
Subject: [mems-talk] TiN


> Dear friends,
>
> I would like to get information regading tecnical papers
> dealing with thermal expantion coefficient of TiN thin layer.
>
> Thanks in advance.
> Masahiro
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