Martin,

Try contacting Professor John Booske at the University of Wisconsin at
Madison:

http://www.engr.wisc.edu/ece/faculty/booske_john.html

He is affiliated with UW's Center for Plasma Aided Manufacturing:

http://cpam.engr.wisc.edu/


I spoke with him last several years ago, but at that time he was researching
a plasma deposition process he called Ionized Metal Vapor Deposition.
Basically it involved applying a bias voltage to a metal substrate (to be
coated), generating a plasma, and then sputtering a coating metal which was
vaporized and attracted to the substrate.  As I recall he could coat just
about any metal layer onto any metal substrate with excellent conformal
coating characteristics, even into very deep, high aspect ratio holes.  He
showed me an object with lots of intricate machining, including tapped screw
holes, which had been uniformly coated with another metal using this
process.

I don't know if he is still involved in this project or not, but he should
be a good contact on the subject.  Good luck.

Regards,

marc
--
Marc Straub
Staff Engineer, Product Development Services
Coventor, Inc.  (Formerly Microcosm Technologies)
7 Corporate Park, Suite 260
Irvine, CA  92606
Ph: 949-756-0033  Fax: 949-756-0070
[email protected]  [take out the XXXX]


> Message: 1
> To: [email protected]
> From: "Martin De_Kegelaer" 
> Date: Wed, 12 Jun 2002 16:50:01 +0200
> Subject: [mems-talk] reflective coating
> Reply-To: [email protected]
>
> Dear Mems specialists,
>
> I am searching for a way to deposit a high reflective coating inside small
> holes in PC.
> These holes are about 10um radius and 100um deep.
> Any suggestions about the technology to use?
> Could Al sputtering give a good coverage and what is the reflection% could
> we expect?
>
> Any help is highly appreciated.
>
> Thanks,
>
> Martin De Kegelaer
>
> ***************************************************************
> Martin De Kegelaer
> Agfa-Gevaert N.V.
> Research Center on Electronic Imaging
> Septestraat 27,
> 2640 Mortsel
> Belgium
> tel: +32 3444 6243
> fax: +32 3444 6450
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