dear fellow

  I need to etch AlGaAs and InGaAs layer on GaAs with BCl3/SF6 or
BCl3/CHF3 chemistry
(we had C2F6, Cl2, O2,Ar, N2 too)Do you know something about the gas
:
Ratio % ,sccm ;RF power, pressure  to etch

thanks


        Arnaud Margolli
        DGA - Celar
        division DIRAC-TECN
        failure analysis -ECE Dep
        + 33  (0)  2 99  42 66 06