Hi all,
        I am going to be replacing a damaged Dorsey Gage e-chuck in an ICP
etching
system and have the opportunity to look at other options.  The chuck is a
tripolar Al anodized chuck made for 4 inch wafers.  Is there a better
alternative to this chuck?  We work in an R&D development environment and
don't need production throughput but would like something that will allow us
better etch uniformity.
Thanks,
Milan

Dr. Milan Buncick
Director, MEMS/Photonics
The AEgis Technologies Group Inc.
655 Discovery Drive
Suite 301
Huntsville, AL 35806
(256) 876-7457
(256) 842-2507 Fax