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MEMSnet Home: MEMS-Talk: Piezoresistor simulation
Piezoresistor simulation
2002-06-16
Yanjun(David) Tang
2002-06-17
Yuan-Fang Chou
2002-06-18
A.J Pang
Piezoresistor simulation
Yanjun(David) Tang
2002-06-16
Hello, folks
 I am doing piezoresistor simulation in MEMS using the program ANSYS. Do you
have some clues about what kind of couple-field element in Ansys can account
for the interaction between displacement of element ( the displacemetn induces
stress and stress induces strain of element then), and the change of its
resistivity. The piezoelectric element only  reflects how structural
displacement affect voltage distribution.
Thanks

Yanjun Tang

Louisiana Tech Univeristy

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