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MEMSnet Home: MEMS-Talk: Piezoresistor simulation
Piezoresistor simulation
2002-06-16
Yanjun(David) Tang
2002-06-17
Yuan-Fang Chou
2002-06-18
A.J Pang
Piezoresistor simulation
Yuan-Fang Chou
2002-06-17
Yanjun,

There is a paper that you might be interested in. It is

Chou, Yuan-Fang, and Lin, Rong-Sheng,  "Optimization for Piezoresistor
Design," Proceedings of the 13th European Conference on Solid-State Sensors,
Actuators and Microsystems , pp. 65-68, The Netherlands, 1999.

Yuan-Fang


----- Original Message -----
From: "Yanjun(David) Tang" 
To: 
Sent: Monday, June 17, 2002 10:43 AM
Subject: [mems-talk] Piezoresistor simulation


> Hello, folks
>  I am doing piezoresistor simulation in MEMS using the program ANSYS. Do
you
> have some clues about what kind of couple-field element in Ansys can
account
> for the interaction between displacement of element ( the displacemetn
induces
> stress and stress induces strain of element then), and the change of its
> resistivity. The piezoelectric element only  reflects how structural
> displacement affect voltage distribution.
> Thanks
>
> Yanjun Tang
>
> Louisiana Tech Univeristy
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