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MEMSnet Home: MEMS-Talk: SU-8 adhesion
SU-8 adhesion
2002-06-19
Greg Miller
2002-06-25
Brubaker Chad
2002-06-26
Brubaker Chad
SU-8 adhesion
Greg Miller
2002-06-19
I've been working with SU-8 50 over the last year and things have been
working well -
However, recently I order a bottle of SU-8 they sent me the new 2000
series-
after I re-optimize the spin speed and followed there standard cure
process on silicon wafer - We still have adhesion problems or film
stress issue that do not occur with the old SU-8

I was wondering if anyone has run into this problem and could offer a
solution.

Thanks,

Greg Miller
KVH Industries
Email: [email protected]

reply
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