Hi Tao,

Which etchant did you use to remove the sacrificial metal?
How thick was the metal? How long did you etch and at what
conditions (temperature, etc.)? Please give more details.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: Tao Xu [mailto:[email protected]]
Sent: Sunday, June 23, 2002 4:12 PM
To: [email protected]
Subject: [mems-talk] Stability of SU-8 in metal etchant?


Hi, Everyone,

    we have a problem in making SU-8 suspension structures, such as
cantilever or bridge structure. We used Cu or Ni as the sacrificial layer.
After we etched the Cu or Ni to release the suspension structure, the SU-8
cantilever or bridge was bended and misalignment. We cannot get the straight
cantilever. Do you think that was because of the SU-8 stress issue, or
because the metal etchant attacked the SU-8 and made it soft. Could you give
us some suggestions about that?

Thanks,

Tao
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