Ion milling will probably give you the
best results.
If you need this done, please contact me
-Mike
_______________
Mike Bigelow
Technical Sales
DRC - Metrigraphics
60 Concord Street
Wilmington, MA 01887 USA
Tel: + (978) 658-6100 ext. 3063
Fax: + (978) 657-7765
-----Original Message-----
From: Xu Li [mailto:[email protected]]
Sent: Monday, June 24, 2002 4:58 AM
To: [email protected]
Subject: [mems-talk] wet etching and/or dry etching of Ni
Dear all,
Would anybody advice me how a straight and smooth side wall can be obtained
by
either wet or dry etching through a ~200nm Ni film?
Thank you very much in advance!
Xu Li
_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/
