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MEMSnet Home: MEMS-Talk: SIN etching
SIN etching
2002-06-24
Suresh Uppal
2002-06-25
Mighty Platypus
2002-06-25
[email protected]
2002-06-25
Shahram Malek
2002-06-25
[email protected]
2002-06-27
Mark Schvartzman
SIN etching
[email protected]
2002-06-25
Have you considered rie etching the SiN? The results should be very
acceptable with selectivity to the underlying oxide around 5:1 using a
fluorine plasma. bob henderson

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