You can visit our site at http://www.samcointl.com/prod/RIE.html to learn
more about SAMCO's line of RIE systems. Please contact us with any
questions or if you would like to receive additional information.

Shahram Malek
SAMCO International, Inc.


[email protected] wrote:

> Have you considered rie etching the SiN? The results should be very
> acceptable with selectivity to the underlying oxide around 5:1 using a
> fluorine plasma. bob henderson
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