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MEMSnet Home: MEMS-Talk: sapphire cleaning
sapphire cleaning
2002-06-25
vincent mortet
2002-06-25
Shahram Malek
sapphire cleaning
Shahram Malek
2002-06-25
Dear Vincent,

Please visit our site at http://www.samcointl.com/prod/UVO.html to learn more
about SAMCO's UV-Ozone Cleaning systems. These systems are very gentle and
effective way of cleaning surfaces without causing any damage to the surface.
Please contact us with any questions.

Shahram Malek
SAMCO International, Inc.



vincent mortet wrote:

> Hello,
>
> I'm looking for a recipe to clean sapphire substrate. This is to study the
> epitaxial growth of AlN on sapphire.
> I like to know the chemical preparations of sapphire (in acides) and the
> thermal treatments under vacuum  that can lead to a clean surface for
> epitaxy. And, what is the state of the sapphire surface after treatment ?
> Any hepl is wellcome.
> Best regards,
> Vincent Mortet.
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