In the late '70 Watkins-Johnson was doing tin oxide CVD.  As I recal, they
were using a propietary etchant from a company called Minetch.

>>> [email protected] 06/24/02 07:44AM >>>
According to the Handbook of Metal Etchants (CRC), Tin Oxide is very
difficult to etch with a wet etch.  The only etch they suggest uses HBr
(Hydrobromic Acid), which is VERY noxious stuff.  Your best bet would
probably be a mechanical etch (RIE, Ion Milling, etc.).

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of aslam muhammad
Sent: Sunday, June 23, 2002 4:16 AM
To: [email protected]
Subject: [mems-talk] Tin Oxide etchant


Hi all,
what could be etchant for tinoxide ( SnO2 ), plz

thankx

M. Aslam
Yahoo! - Official partner of 2002 FIFA World Cup
http://fifaworldcup.yahoo.com
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