I have always developed PMMA with a mixture of MIBK and IPA -
this web page should help with the mixtures:
http://www.microchem.com/products/pdf/PMMA_Data_Sheet.pdf

Hope this helps,

Greg Miller
KVH Industries
Email: [email protected]


-----Original Message-----
From: Haigh, Richard [mailto:[email protected]]
Sent: Wednesday, June 26, 2002 3:31 AM
To: [email protected]
Subject: [mems-talk] RE: PMMA developers


Hi

I am interested in solvents that can be used for the development of
polymethylmethacrlate photo-resists. Does anyone know of a company that
supplies these. I have an application that requires unhydrous solvents.

Richard Haigh
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