PMGI can be planarized by reflow - bake temperature is 250-290C.. I used
270C, 10 min  hotplate for changing litho-defined brick shape to something
like a bead.
However I'm not sure if PMGI remains photosensitive after such  bake - check
with MicroChem...

Mike



> -----Original Message-----
> From: yazan hijazi [SMTP:[email protected]]
> Sent: Wednesday, June 26, 2002 5:20 PM
> To:   [email protected]
> Subject:      [mems-talk] acheiving a uniform sacrificial layer profile?
>
> hello everyone,
> I am developing a fabrication process for a capacitive
> mems switch. A gold bridge will be suspended over a
> Coplanar Waveguide transmission line. The problem I am
> facing is that the sacrificial layer that I am using
> (PMGI SF15) will follow the contours of the
> transmission line underneath it!! How can I get a
> sacrificial layer profile that is maximally flat?
> I would appreciate any input on this matter as soon as
> possible!
> Sincerely
> Yazan Hijazi
> Grad. Student in EE
> Yahoo! - Official partner of 2002 FIFA World Cup
> http://fifaworldcup.yahoo.com
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