Hi,

I am looking for a resist with which to do some excimer laser
micro-machining for a laser LIGA evaluation. I need something that
machines well (PMMA is a common choice) and that can be disolved off
afterwards. I need resist thicknesses in the range 100-200 microns.

Does anyone have any advice of type of resist, supplier etc. so that I
can try some.

Thanks

Richard Winfield
National Microelectronics Research Centre
Ireland
[email protected]