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MEMSnet Home: MEMS-Talk: AZ4562 or other thick photoresist
AZ4562 or other thick photoresist
2002-07-02
hzeng
Problems with liftoff(on quartz)
2002-07-03
Balaji Lakshminarayanan
2002-07-03
A.J Pang
2002-07-03
Qingwei Mo
RE: AZ4562 or other thick photoresist
2002-07-05
hzeng
2002-07-08
Anatoli Olkhovets
2002-07-03
Grobe, Dirk
2002-07-08
Danny Hirdes
AZ4562 or other thick photoresist
hzeng
2002-07-02
Dear Collegues,

Could you help me to reach the answer of following questions,

1. Where can I get the AZ4562 photo resist, especially in US?
2. Is there any extreme thick photoresist else which can be easily removed
by chemical liquid such as acetone?

Thanks for your attention,

Hongjun Zeng
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465

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