You can try AZ9260 which can be 10-20um easily.
Qingwei

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of hzeng
Sent: 2002?7?2? 13:12
To: [email protected]
Cc: [email protected]; Hongjun Zeng
Subject: [mems-talk] AZ4562 or other thick photoresist


Dear Collegues,

Could you help me to reach the answer of following questions,

1. Where can I get the AZ4562 photo resist, especially in US?
2. Is there any extreme thick photoresist else which can be easily removed
by chemical liquid such as acetone?

Thanks for your attention,

Hongjun Zeng
Microfabrication Applications Laboratory (MAL)
University of Illinois at Chicago
ERF Building, 842 W. Taylor Street
Chicago, IL 60607-7022
Room 3014 ERF
Tel.: 312-413-5889, Fax: 312-996-6465
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