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MEMSnet Home: MEMS-Talk: Metallic Deposition on Silicon Rubber Material?
Metallic Deposition on Silicon Rubber Material?
2002-07-03
Yongxiang - Li
2002-07-05
[email protected]
Metallic Deposition on Silicon Rubber Material?
[email protected]
2002-07-05
You should be able to sputter Aluminum onto the substrate with little problem
as our systems run at around 80 degrees C. Bob Henderson

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